Control Of A Linear Motor Actuated Parallel XY Table

The research theme of this dissertation is the feeding system of Permanent Magnet Linear Synchronous Motors (PMLSM) and its control scheme. Base on the original thoughts, new theories and technologies of correlative subjects, a PMLSM feeding system is established. The dynamics and control strategy as well as key technologies of PMLSM feeding system are studied systematically by combining theoretical analysis, computer simulation with experiments.With the development of the technology, high-velocity and high-precision has become the important development trend of machining productivity, high-speed and high-precision drive system has developed a lot, high-speed and high-precision screw, linear motor, air-bearing and every kind of new technology are been used in dive system. At last, based on a servo system with high acceleration, an X-Y position platform driven by linear motors, a controller is proposed to make the platform position quickly with high precision.The key factors on fast high-precision position control of high-acceleration systems are the load changing and the outside disturbances, since that the load changing slows down the system's response and the disturbances degrade the position accuracy. Working in this dissertation is mainly about how to deal with these two factors. Firstly, we familiar with the work principle of linear motor and all the disturbance factors, and get the dynamical modeling of linear motor using the frequency response method. Then according to the stability and anti-interference law based on the system, we design a H_∞controller. Contraposing to the model uncertainty and complex disturbances, we design a mixed H_∞robust controller, and analysis this controller using frequency response method. The analysis results display that this controller can suppress the disturbances in all frequency domain, especially in low frequency, and the controller has good stability. H_∞controller has good performance in all parts like response velocity, anti-interference ability both simulation and real experiments.