Design And Study Of A2-DOF Positioning Platform Driven By Linear Motors

In order to improve the efficiency and quality of wire bonders, this paper presentsa new2-DOF positioning platform drove by linear motor. This dissertation deals withthe key issues relevant to structural design, static and dynamic characteristics anddynamic modeling by means of finite element method and mechanical dynamics. As aresult, a prototype machine of XY high speed precision positioning platform has beendeveloped. The following research works have been completed.Combining mechanical design theory with practical application, a linear motordirect-drive new high-speed precision positioning platform has been developed. Anew flexible decoupling mechanism is proposed in the table. According to theperformance indicators, choose the basic parts and processed materials so that theplatform not only meet the characteristics of small size, low mass, high stiffness,convenient, but also reached a high-speed and high-precision positioningrequirements.The static characteristics of the XY table which is drove by bidirectional motorsunder no-load and load have been studied, and the dynamic characteristics of the XYtable in the free state have been obtained by the finite element method. Based on theresults, the dynamic structural design of the XY table has been implemented.The bond graph approach is used to perform the global kinetic model of the XYtable with bolted connections, elastic connections. The influence of the equivalentstiffness and equivalent damping of the bolted and elastic on the positioning platformresponse is analyzed.The prototype machine of XY table has been developed. The experimental resultreveals that the actual performance meets the design requirements.The above research has an important significance to promote the technicalprogress of the microelectronics packaging equipment.