.0.15 Micron Process Lithography Patterning Defects And Technological Project Management

Application of semiconductor products more widely, As the brains of electronic devices, the heart of power control. The pursuit of its increasingly high performance and reliability is bound in the semiconductor manufacturing process also need to improve yields and reduce defects. In these years, the growth rate of semiconductor market started to decline, in the past that have sought in miniaturization technology to reduce the cost of the route had been close to the limit, and thus the pursuit of product yield to reduce costs and improve the competitiveness of enterprises.Photolithography process plays a key role in semiconductor manufacturing, from the 0.25 micron,0.18 micron to today's 0.15 micron, 0.13 micron, and even 90nm invariably progress from lithography process innovation. In lithography the existence of a kinds of defects affecting the product yield. In this thesis, research for the 0.15um process lithography pattern defects projects.This thesis start with the basic theory of project management, combined with the actual set of project management in the community and role of the practical application.Second, someone maybe not familiar with semiconductor industry wafer production line may, In this thesis will brief introduce semiconductor manufacturing conditions and processes, focusing on advanced technology in the lithography department is facing challenges, which leads to project management in the lithography process value.Third, through the analysis of project management application in the semiconductor industry, focusing on the 0.15micron process lithography pattern defects research project management, specific applied research several major factors of this project, such as risk management, schedule management and cost management, and give a proposal how to increase or improve project management.Finally, through the analysis of this project, self experience on the lithography process management and grass-roots awareness of proposed limitations existed in project management of the semiconductor industry, but also with the status of the semiconductor industry, we have a bold outlook project management application in the semiconductor. And base on own project management knowledge with practical applications, derived the views that project management should be the important part of companies.