Hcd, Ion Plating Production Process Automatic Control System Design And Development

As a material surface treatment plating technology, Hollow Cathode Discharge (HCD) ion plating is a complex production process with many control parameters, and has the characteristics of coupling, nonlinear and time-varying. It cannot be described with a precise mathematical model and it is difficult to realize process stability control by conventional control methods. Therefore, using advanced control theory, computer and network communication technology, the developed automation control system for HCD ion plating production process can realize the production process comprehensive automation and improve production quality and production efficiency. Moreover, it is of great significance for other's ion plating enterprise to design and develop computer automation control system.In this paper, HCD ion plating production process computer control system research and design approach is described in detail. On the basis of the analysis of HCD ion plating, discussed the effects of temperature, gas (N₂, Ar) flow, vacuum on plating quality on ion plating, as well as the main factors affecting the ion plating temperature, gas (N₂, Ar) flow and vacuum. The temperature on ion plating to have a direct impact on the substrate bias is charged with objects. In this paper, we introduced an improved fuzzy control algorithms. Selecting the gas (N₂, Ar) flow as the control objective, a double closed-loop control system with variable ratio is proposed. With the control objective of the Roots pump, the furnace vacuum control is realized by adjusting the pump speed through the inverter.Based on HCD ion plating characteristics, the overall structure and network structure of the production process computer control system is designed. Using WinCC configuration software, the monitoring software for ion plating production process is designed and implementation process is analyzed and discussed. After debugging, the system has been put into use and the results of the on-site operation show that system has good stability, high reliability and achieves the design objectives and requirements.