Microfluidic Research And Software Simulation Of The Control Chip Produced

Fabricating the microfluidic master by silicon isotropic wet etching costs less than using photoresist. This microfluidic master is more durable than the photoresist. Compared with the anisotropic silicon wet etching, it is quicker and has less pattern deformations. In this article we will research on the characteristics of the isotropic silicon wet etching. The detailed process of fabricating the microfluidic master using isotropic silicon wet etching will also be introduced.Soft lithography is one of the most important methods to make the microfluidic channels. In this article, we will briefly introduce the development and the application of the soft lithography. During our experiments, we have researched on the process of the monolayer soft lithography and multilayer soft lithography in order to do better in the further research on the microfluidic system fabrication. We also test the multilayer characteristics by the experiment on a microfluidic valve.Microfluidic liquid waveguide bases on the principles of laminar flow. This waveguide will have more application in sensing and delectating device. By the finite element method, we simulate the laminar flow in the microfluidic channel and analyze the relation between the change of the refractive index and the change of the concentration of the solution and the driving pressure in the channels.