Helium Mass Spectrometer Leak Detector Developed

With the development of the modern manufacturing technology, the advanced methods with higher precision of leak detection are required. Helium mass spectrometer, a method of leak detection, plays a more and more important role in the modern manufacturing technology to assure the quality of products. Helium leak detector, with the advantages of high precision, steady performance, pollution-free etc., has been regarded more and more, and has been applied widely not only in the traditional air-conditioning manufacturing industry but also in the fields of new-rising electro-products and spaceflight. The performance and stability of the automatic helium leak detecting device are affected directly by that of helium leak detector, which is the most key component in the automatic helium leak detecting device. The competitive ability of helium leak detecting device in the market can be improved by substituting the helium leak detectors researched and manufactured by oneself for the imported ones because of reduced configuring and maintenance costs greatly.A helium leak detector consists of a Mass Spectrometer Module and an Electronics module. The helium ion flow is transferred out as a signal of electric current in the Mass Spectrometer. The principle, the manufacturing conditions and the manufacturing technology are so difficult and serious that it is very difficult to produce the Mass Spectrometer module with perfecting performance depending on the internal technology and manufacturing levels. The signals of electric current are collected, analyzed and processed in the Electronics Module, and finally transferred out as the signals of leak rate relative to the tested leak. With the researching subject of the mass spectrometer manufactured by German INFICON Inc., this subject which has established the basis for the development of helium leak detector in the future, introduces how to research and design the electronics module, and how to assemble a mass spectrometer with high-performance and high stability.The main contents of this dissertation include:1. Analyze the status and development of the helium leak technology in the detecting industry. Introduce the principle of Helium leak detector and the trend of the helium leak detector.2. According to the main functions of Helium leak detector, research and design the general proposals of Helium leak detector and the proposal of its electric control system.3. Elaborate on the principle and functions of electric control system, and then devise the hardware control circuits on the modular principle, and analyze the security test of the circuits as well;4. According to the principle and process of Helium leak detector, the software is designed and tested;5. According to the researching proposal, a helium leak detector is manufactured and assembled through debugging the experiment system , the feature parameters and the technical specifications are analyzed.