Double Value Characteristic Of Leak Rate Of Pressure Adding Helium Mass Spectrum Test And The Reliable Combination Of Gross-and Fine-leak Detection Of The Seal

Along with the micro electron technology development, the electronic products integration rate increases day by day. The higher speed, the boosting power, the increasing I/0 numbers give the seal technology more requirements, the seal density directly affects the qualification and reliability of IC manufacture, as will as the high frequency performance, the thermal properties, the reliability and the cost of IC. The helium mass spectrum analyzes leakage analysis is one of the popular leak detection method. But the influence of the analysis result, caused by the double value of characteristic of leak, didn't find very good solutions since long time ago.In order to correctly carry on the leak-proof sift test work of IC, and solve the problem meeting during work, it is important to forecast effect of the reliability of leak-proof screening test, understand seal characteristic of the leaking hole in ICs, as well as research the leaking rate statistical distribution .This thesis proved the popular used formula in domestic and foreign, the molecular flow formula of pressure adding helium analysis, having "the double value characteristic", which mains that corresponding each measured leaking rate, there are two actual leaking rates available. These two values can get by table looking up or computer programming. The result of this thesis will use in IC package helium leaking test. And it will be a better solution of reliably to link up the gross and fine leaks analysis.