Mems Acceleration Sensor Hardware Circuit Design And Signal Processing

The MEMS devices produced by the Micro Electro Mechanical System(MEMS) technology not only had the volume to be small, the function integration characteristic, moreover enhanced the use reliability, reduced the cost, which is very important for the fields of advanced technology. The acceleration instrument is a MEMS technology application important domain.In the rapid development of digit technology age,choosing digital control become a important step and trend. The DSP chip has high speed, the highly effective characteristic compared with other microprocessor.Choosing proper dsp to carry on processing to the acceleration signal is a inevitable trend .In such background, this thesis hope to develop and designs a series of applying in the military, the automobile and other domains test systems by researching the DSP and the MEMS inertial sensor,.This thesis mainly include following facets:The thsis designed a new type of four central suspension beams structure hardware electric circuit with the reference of ADXL203 and carried on the electric circuit simulation. Because of the artifactitious limit, this thesis only can choose a similar accelerometer to carry on the digital signal processing to the signal.While comparing different dsp and accelerometer, this thesis chose the TMS320LF2407 of TI Corporation and the ADXL203 accelerometer of AD Corporation, and constructed a signal processing system which realized the high speed data operation of the time domain and frequency range, which made the acceleration, the speed, and the displacement of real-time measurement quickly and reliably.Based on the CCS software development flow, the design of software were finished, and a good effect was obtained. Using Fourier transformation computational method, the FIR filter was designed. The acceleration signal dynamic error was revised through the FFT,IFFT and frequency correction in the operating frequency scope. The signal processing had been realized on DSP, and the signal data was really recorded.In the acceleration signal digital processing process, using the software and the hardware antijamming measure guaranteed acceleration signal resolution, and overcame...