Research On Acceleration Detection Technology Based On MEMS Optical Fiber Micro Displacement Sensor

With the continuous development of the market to miniaturization,so micro mechanical system in the market's position is also increasingly obvious.Compared with the traditional system,the micro mechanical system is small,and has strong external disturbance force.Micro mechanical system not only has strong application value in physics,optics,etc,but also can be applied in the fields of biomedicine and micro control.It has a strong advantage in accuracy,sensitivity,response speed and so on.In this paper,a new type of optical fiber micro displacement sensor based on MEMS technology is studied.In the first,it introduces a novel MEMS optical fiber micro displacement sensor model,according to the received optical fiber receiving light power changes the difference in displacement process to determine the size of the receiving fiber displacement,establish relations of receiving optical fiber displacement and optical power difference.When the received optical fiber displacement is changed from 0 ~10?m,the corresponding receiving optical fiber optical power difference is changed by 0 ~ 0.6306 mW.Then,the relationship between the optical power difference and the system acceleration is studied,and the fiber is embedded into the cantilever beam.The relationship between the displacement and the acceleration of the received fiber is obtained,and the relationship between the fiber displacement and the acceleration is established.Finally,based on the relationship between the optical fiber power difference and the displacement,the relationship between the optical fiber power difference and the acceleration is established.It is found that when the displacement of cantilever beam varies in the range of 0 ~10?m the corresponding acceleration value is20 ~100m/s and the maximum acceleration value is reached to10 g.Because the MEMS system is very small,so in the process of signal detection requires a certain degree of amplification and adjustment,and in the design of amplifier circuit design,often due to the Rejects,and too much noise into the signal,the rational design of the amplifier circuit is based output signal detection.This paper introduces the design of filter circuit in the amplifier circuit on the basis of,and through the low-pass andhigh pass filter and adaptive analysis,using least mean square(LMS)algorithm for adaptive filtering,low-pass and high pass filter relative to the fixed frequency has the certain superiority.