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Zinc Nitride Powder And Zinc Nitride Films

Posted on:2007-04-15Degree:MasterType:Thesis
Country:ChinaCandidate:W DuFull Text:PDF
GTID:2208360185482617Subject:Microelectronics and Solid State Electronics
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Zinc nitride powders have been prepared by direct reaction between zinc powders and ammonia gas (NH3) in 500 ml/min under different temperature from 500 ℃ to 750 ℃ for 3h. We found that the zinc nitride powders prepared under 600 ℃ has the best quality. The structural characterization of the zinc nitride powders was investigated by Rigaku D/Max-γ A X-Ray diffractometer (XRD). It was found that the zinc nitride powders were cubic in structure with the lattice constant a=0.9788nm. This lattice constant was fairly agreement with a=0.9777nm that was recorded in the JCPDS document (Powder Diffraction File Compiled by the Joint Committee on Powder Diffraction, 1985, Card No. 35-0762.), also the crystal indices obtained were in good agreement with the data of JCPDS document, which means we've synthesized zinc nitride powders with good quality. Surface morphology was measured by using scanning electron microscopy (SEM) and transmission electron microscopy (TEM). The results showed that nanowires, hexagonal prism crystal grains, hollow spherical shell particles and other irregular shapes were found. In conclusion, zinc nitride powders have an abundant surface morphology.Polycrystalline zinc nitride films were prepared on quartz and silicon substrates with zinc nitride and pure zinc targets by RF Magnetron Sputtering at room temperature. The structural and optical properties of zinc nitride films had been studied. The relations between deposition powders and deposition time with the characteristic of zinc nitride films also had been investigated.1. The zinc nitride films prepared on different substrates or with different targets were cubic in structure which can be seen from the AFM images and XRD spectra. Through SEM image, it can be found that the zinc nitride films prepared on silicon substrate had a dense structure, but the zinc nitride films prepared on quartz substrate had a more abundant surface morphology. The hexagonal prism crystal grains had been found through SEM images.2. Optical transmission spectra of zinc nitride films deposited on quartz substrate were measured with a TU-1901 UV double beam spectrophotometer. A clean quartz glass was used for a reference. The film thicknesses were calculated from the transmission spectra: also the deposition rate was calculated from the film thicknesses and deposition time. It was found that the deposition rate of zinc nitride target was much smaller than that of pure zinc target. The optical band gap was...
Keywords/Search Tags:Zn3N2, absorption coefficients, optical band gap, rf magnetron sputtering
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