Carbon Nanotube Thin Films And Field Emission Characteristics Of The Study

Vacuum microelectronics is a rising subject. It have both advantages of vacuum device and micro-electronics device, and can be in field emission display, microwave and millimeter-wave device, sensor and so on. But we must find the field-emission cathode that can be used in practicality.The discover of carbon nanotubes attract many scientists's attention. Carbon nanotubes can be used in many domain due to it have excellent mechanics, electricity and magnetics. Carbon naontubes have a high ratio in length-radius, low workfunction, good electrical conductivity and nanometer tip, it can emit electron long time in low voltage. So it have been considered a good field-emission cathode and have been used in electron beam device such as SEM and TEM. We can expect it have a widely application in field emission display.The paper have a general introduction in structure, physical character and application of carbon nanotubes and emphatic introduce the application in field emission display. The paper have introduced the diversified growth-method and growth-mechanism of carbon nanotubes. Chemical vapor deposition(CVD) is a central method of growth carbon nanotubes. Because the method have a simple equipment and low cost, the reactive process is control easily and carbon nanotubes's quality are good and the output is high.The paper considered the joule heating and Nottingham effect, caculated the temperature on emitter's tip and caculated the field-emission current of a single-walled carbon nanotube can reached during simulation and caculate. We electroplated catalyzer on silicon of vaporized Al and vaporized NiCr alloy as catalyzer on silicon, growthed carbon nanotube film on silicon with CVD. The result of field-emission was the field-emission current reached 60and the field-emission current densities reached 10. We watched the bright facula when electron-beam hitting fluorescent-screen. The carbon nanotubes film's turn on fields have obvious reduce after dealed with H2 plasma and the current have obvious increase after annealed. In experiment, we have watched some nanotubes that growths way were unique. This is a good basement for more application of carbon nanotubes.