Micro-institutions Tunable Filter Array,

With the increased requirements of integrated functional micro components, more and more efforts were devoted to the research of microsystem technology. Most of these research work were relative to IC techniques. These components were built on silicon or analogous semiconductive material and used in many areas. The research of this thesis chooses a different way. The tunable filter based on microstructure is built on glass and fabricated using thin film deposition and micro machining. The research work has been progressed. The content of the thesis is based on the following aspects.1. The thin film design of the F-P filter is done. The dielectric reflector of F-P filter is finally chose after we compare the performance of the dielectric reflector and the metal reflector. The electromechanical models of the tunable filter based on microstructure are built. They include the beam model, the plate model and the step-up support model. The three models are analyzed, the original structure size and the tunable range are calculated.2. The result of curvature of the plate model is calculated through finite element analysis. We can see from the simulated figure that the plate is curved to a three-dimensional surface under averaging vertical load. The influence of the length to width ratio to the optical performance, the tunable characteristic of the filter and the output spectrum of the filter under signal averaging effect are analyzed respectively. The filter should keep a right length to width ratio to maintain a good optical sample window and mechanical strength. The filter has a good linear tunable characteristic under small distortion. Although the optical sample area has curved to a three-dimensional surface, the transmittive spectrum of the filter still has a high transmittance and a narrow bandwidth due to the small distortion and the concentration of the input beam of light.3. The fabrication process of the filter is designed and its feasibility is tested through experiments. The selection of parameters in the experiments is discussed. Problems which may occur in the experiments is put forward and the solvents are discussed too. The sticking effect which is sure to occur in the wet etching is described in detail and many methods to avoid it are cited.4. Finally the work have done are summarized and the research directions which are deserved to deep study are brought forward.