Computer Simulation And Performance Testing Of Vacuum Microelectronics Triode

With the use of Finite method we have developed computer simulation software for vacuum microtriodes with wedge-shaped and cone-shaped cathode on the basis of stduying deeply the field emission theory of vacuum microelectronics.The software included field section, grid point numbering, and the calculation of electric currents, transconductance and cathode capacitance, moreover, it can simulate the properties of vacuum microeletronic with variant structures and sizes. The relationship was studied and simulated among electic properties and device structures, sizes and cathode materials etc. The optimized design of vacuum microtiode was proposed. Integrated vacuum microelectronic device was designed in terms of computer simulation result and semiconductor technique. We also developed ZVD-1 Testing Instrument for vacuum microelectronic device properties. After comparing the experimental data and simulation results of the electrical properties,we got the conclusion which will be benefit for the advanced study of vacuum microtriodes.