| In this dissertation, high quality double-sided epitaxial High Temperature Superconducting YBa2Cu3O, (YBCO) thin films with low microwave surface resistance (Rs90K, A Tc<1K, Rs1 inch) in detail, a novel substrate bi-axis rotation mode has been used for the deposition of large area double-sided YBCO thin films. By choosing optimum deposition parameters, high quality double-sided YBCO thin films have been obtained on 2 inch (in diameter) LaA1O3 (100) substrate with Tc0.89-.-92K, A Tc=0.2?.4K, and Rs1<36.5m Q (side 1), Rs<49m Q (side 2)at measurement of 144.8GHz and 77K, or Rs<0.17m Q (side 1), Rs<0.23m (side 2) at measurement of 10GHz and 77K, which is one of the best results in the world wide according to reference reported up to now. Then, a two-dimension HTSC microwave resonator -Disk Resonator has been studied. The primitive device has been obtained and measured after having optimized the film etching process, analyzed the distribution of electromagnetic field and studied the characteristic parameters, such as resonating frequency and unloaded quality factor. It is very useful for further studying the power-loaded characteristic and the non-linear effect of YBCO superconducting thin films. |
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