Design And Implementation Of SPC System

Semiconductor manufacturing process is a complex production process, oxidation diffusion, photolithography, etching, cleaning, deposition, etc. no less than approximately three four hundred steps. How to monitor data flow analysis has become a major problem, relying solely on traditional manual records do not reflect timely reminder of the SPC and technology. Traditional quality management is based on products quality inspection, so although able to control the quality of products, but check just made with the specifications required to make a comparison, or only to stop the flow of nonconforming product, but can not stop its production, in particular the need for extra cost and complexity, and a lot of time to check not only a waste of raw materials and also reduces productivity.In this thesis, combined with the control characteristic of semiconductor process control, in order to solve the problem of the semiconductor business process quality control, developed a SPC technology based on process control system, the system not only store he product, production, technology, equipment, and other information in the database, but also on the quality of the analysis and exception handling characteristics from the past " post-test " into the present " to predict in advance." Overcome the shortcomings of traditional quality management system after the error correction. Achieve the purpose of the data collected from the calculation and analysis functions, eliminate and prevent substandard products, effective control of the process, so as to improve production efficiency and market competitiveness.