High Concentration Oxygen Detection Of TiO 2 Sensor

In the medical treatment, doctors use about 70% oxygen of mixed gas on the patient`s emergency treatment. The 30% oxygen of mixed gas is used for the rehabilitation of the patient; In the process of production, because of controlling gas components become more stringent in industry. Energy conservation from burning boiler and steel-making are needed to accurately measure higher levels of oxygen; from the aspect of monitoring environment, they need a kind of sensor which could monitor oxygen concentration. However, the almost of oxygen sensors in the market focus on the measurement of lower or normal levels of the concentration of oxygen. There is a few sensor which can measure higher level oxygen concentration. So this paper will focus on that topic and further discuss.On the basis of collecting and analyzing the domestic and foreign literature. Through using its principle to conduct depth discussion by the following work in the experiment.In this experiment, the researcher designs and makes the structure of the sensor. The researcher optimize the parameters of magnetron sputtering during the TiO2 thin film production. In the same time, the researcher tests and analyzes the TiO2 thin film influence by annealing temperature. It is clear that the semiconductor oxygen sensor based on the TiO2 thin film`s sensitivity rise when the oxygen concentration exceed 70% when gradually increase the amount of Pt-doping. Following increase the amount of W-doping, there is no obvious change under the same conditions. When increasing the amount of Fe-doping, the resistance of TiO2 thin film sensor substantially falls down. Experiment select the TiO2 thin film sensor with Pt-doping to testing the relationship between the operation temperature and the sensitivity of the sensor under the higher levels of oxygen concentration based on the result of experiment.