Research On Strategy Of Implementing Precise And Fast Conversion And Maintenance In Semiconductor Manufacturing System

The ways of operation, production and management are revolutionarily changing with the popularity of lean production theory and lean thinking. Higher request of equipment s flexibility and stability is needed with more complex production processes and more product categories, especially in semiconductor industry. So, these issues became important for many companies: How to realize SMED (single exchange of die) theory; how to maintain equipments accurately and fast; how to reduce the waste of equipments; how to improve the total equipment s efficiency and how to create more value for companies.This paper describes researches and applications of the lean production theory and lean thinking briefly and introduced the development of equipment maintenance and management. It also summarizes the way to implement precise and fast conversions and maintenances in semiconductor industry systematically, based on a six months research in a semiconductor company. This paper also used six sigma DMAIC improving methods to standardize and control the whole process. The result showed that the process optimization and other ways used in this project and shorten conversion and maintenance time and increase the precision significantly. At the same time, these improving methods also can reduce the Work In Process.Finally, this paper discusses implementation conditions and limitations of how to implement precise and fast conversions and maintenances, and predicts the next steps and directions of further researches. The practice experience is shared to all relevant manufacture field s equipment management as beneficial reference...