Study On Preparation And Properties Of TiN Coating With Both Low-e And Solar Control Performance

The development and utilization of new substitute materials and energy-saving technology have been paid extensive attention to with growing concern about the energy crisis.In modern architecture,various functional coatings on window glass such as solar-control coatings,low-e coatings,self-cleaning coatings etc.,have been widely used for the energy-saving purpose to reduce the energy loss induced by the heat transfer through glasses.In cold climates,Low-e coatings glass can be used and expected to reflect blackbody radiation from the human body and other objects in the house.In hot climates,solar-control coatings glasses can be used and expected to reflect near-IR part in solar radiation and reduce the heat into house through glasses. In China,it is expected to produce the coating which can combine the solar control properties and low-e performance considering typical the weather of Summer Hot and Winter Cold in China.In the present study,APCVD technique was applied to prepared TiN coatings on common glass substrates using NH3 and TiCl as reactants.The effects of different parameters on the structure and properties of TiN coatings were investigated to optimize the energy saving performance.EDX,XRD,XPS,SEM and UV-Vis spectra were used to determine the composition,microstructure,electron structure, morphology,and transmittance and reflectance spectra.The results shows that TiN coatings can be prepared at the deposition temperature range between 450-650℃.The energy-saving performance of coatings was improved as well as the conductivity with increasing temperature.Nitride composition increased with increasing NH₃ ratio, which resulted in the lattice constants increased.The coatings with Nitride x near 1 showed the best conductivity.The reflectivity increased and transmittance decreased remarkably with increasing deposition time.The optimum energy-saving performance more than 60%mid-far infrared reflectivity,about 50%near-infrared reflectivity and 13%visible transmittance could be obtained under the following deposition conditions:temperature 600℃,deposition time 45s,flow of NH₃ and TICl₄ 120 and 300sccm.V-doped TiN coatings were prepared through doping VCl₄ into reactants TiCl₄.The composition of V atoms was found to be consistent with the amount of VCl₄ in TiCl₄ and constants as the deposition time extends.XRD and XPS results indicated that doped V atom substitute the atoms in TiN lattice.The doped TiN showed better conductivity and higher infrared reflectance than pure TiN coating.The doped TiN coating showed higher visible transmittance through reducing the deposition time, which improveed the energy-saving performance of TiN coatings.