| With the development of economics, science and technology, energy crisis is getting ever more acute. Energy preservation takes worldwide attention gradually. Energy-saving coating glass is a kind of excellent building material with high efficiency. In order to overcome the disadvantages that now energy-efficient multilayer coating glass production process is complicated and have a very high cost, a new method for the energy-saving single-layer coating glass preparation using excellent conductive titanium compounds as energy-saving materials has been proposed in this paper. In this study, the synthesis、electrical and optical properties of TiN and TiC energy-saving single-layer films deposited on glass substrates were also investigated. The chief results are as follows.Firstly, using the atmospheric pressure chemical vapor deposition method combining with the float glass production line, single-layer TiN films were deposited on the glass substrates by using TiCl4 and NH3 as gaseous raw materials. The influences of NH3 flowrate changes on the crystallization, surface and cross section topography, composition, electrical properties and optical properties were researched by XRD, SEM, EDX, Four-point probe sheet resistance measurement, Uv-vis spectra and so on. The results are as follows:in the pure TiN film, with the NH3 flowrate increasing, the ratio of N/Ti increased from 0.691 to 1.381, and the crystallinity of the film and the lattice constants first increased and then decreased, the sheet resistance of the film first decreased and then increased. When the flowrate of NH3 is 100sccm, the sheet resistance of the film decreased to 12.6Ω/sq. The excellent energy-saving performance with about 60% near-infrared reflectance and 87.87% medium-far infrared reflectance could be obtained. But the visible transmittance was very low, only 17%.In order to improve the visible transmittance of the TiN films, we prepared V-doped TiN films. In the V-doped TiN films, with the NH3 flowrate increasing, the ratio of N/(Ti+V) increased from 0.8795 to 1.2419, the V content in the films was maintained at about 0.4%, and the crystallinity of the film and the lattice constants first increased and then decreased, the sheet resistance of the film first decreased and then increased. When the flowrate of NH3 was 100sccm, the sheet resistance of the film decreased to 8.3Ω/sq. The excellent energy-saving performance with about 60% near-infrared reflectance and 91.75% medium-far infrared reflectance could be obtained. In this case, the visible transmittance reached up to 33%.Secondly, with the coating method, single-layer TiC films were prepared on glass substrates by using TiC powder as primary material and PVP, PEG, PVA as additives, also, the TiC film forming conditions were investigated. The influence of heat treatment, PVP content and the solution dropwise on the surface topography, composition, electrical properties and optical properties were studied by SEM, Four-point probe sheet resistance measurement, Uv-vis spectra. The main results are as follows:The films had the excellent photoelectricity performance on condition that PVP and PEG were mix added, when the pH was 10. The optical and electrical properties of TiC films containing PVA and PEG, had been improved after heat treatment. The sheet resistance of the film reduced to 221Ω/sq, and the reflectivity in the near-infrared region increased to 7%. With the content of PVP increasing, the sheet resistance of films decreased gradually, and its near-infrared reflectance first increased, and then hardly changed after that. With the amount of solution dropwise increasing, the sheet resisitance of films first increased and then decreased, and the near-infrared reflectance of films gradually decreased. The films had best energy-saving performance on condition that PVP content was 5 wt% and the amount of solution added was 4ml. At this point, the sheet resistance of films reached up to 44.4Q/sq and the near-infrared reflectance reached up to 16%, indicating the film with the good energy-saving performance. |
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