Design And Manufacture Of Three-Dimensional Micro-Motional Scanning Stage

With the advancement of science and technology, and meanwhile, with the fast development of some fields such as the telecommunication engineering and the precision engineering, the research of the precision positioning system with high precision, high-resolution and the high-reliability has attracted more and more attention. It also develops by leaps and bounds. By contrast with the foreign countries which started earlier on this field and have made some prominent achievements, China has a relatively late beginning and a relatively weak technology for this research. On the basis of the collection of the related data in quantity, this paper analyzes and summarizes the principles and features of the domestic high-precision motional stage as well as those of the foreign ones. A three-dimensional high-precision micro-motional scanning stage for the three-dimensional contour scanner is designed and implemented. This paper also introduces the process of the design and implementation of this stage scheme in detail. According to the functional requirement of the three-dimensional contour scanner, this paper compiles control software for the three-dimensional micro-motional scanning stage and then finishes the functions of the stage by combining the software with the hardware, including basic control functions for optics sensor, micro-motional stage and camera, meanwhile the auto-scanning function is accomplished. During the test of functions, the performance of the sensor and stage is checked. It also theoretically analyzes the positioning precision and the zero-point positioning precision of the micro-motional stage. Base on the scan data, this paper finds the problems, analyzes, revises the code and then scans again to get the data, records the improvement of the scanning function and corresponding data and images. At last this paper introduces the data processing software for the three-dimensional contour scanner.