The Establishment Of Scada System For Air-Conditioning System In Modern Clean Room

With the continuous development of modern science and technology, it will run from the traditional mode of the past and equipment maintenance methods in an advanced semiconductor plants. In order to improve the equipment operating efficiency and promote the stable operation of equipment, it has begun to establish a set of monitoring system which based on device net, profibus and Ethernet communications network in many modern factories. Network Communication, as a new direction for information transmission, provides interactive information to people that offers us great convenience. Firstly, the rapid development of the networks provides a flexible and convenient communication links for the communication. Secondly, transmission information through network makes it more easily to interact and exchange information. Network remote monitoring system is a kind of technology, which realizes data remote monitoring and control through network. It can realize long-distance transmission, real-time monitoring functions in the local and remote stations. SCADA (Supervisory Control and Data Acquisition) monitoring system, is a kind of remote control and data acquisition and monitoring system. SCADA system is computer-based, production process control and automatic dispatching system. It can monitor and control the equipments on site, to achieve data acquisition, equipment control, measurement, parameters regulation and a variety of signal alarms, and other functions.SCADA system is of a very wide application field, it can be applied in petroleum, chemical, power supply, water supply system, municipal and other areas of data collection, monitoring and process control. SCADA system is also called telecontrol system in power system and electrified railway.Origin of Clean room: Early, the first batch of clean rooms appeared in hospitals. Lister knew about that bacteria could cause surgical wound infection. This was his historic contribution. He thought that bacteria should be cleared from the operating room to prevent wound infection. This was the first group of scientific theoretical foundation of clean-room.Clean room is the key facility of LCD production workshop. HVAC (Heating, Ventilating and Air-Conditioning) system is essential for clean room environment to maintain the clean room with a certain degree of cleanliness level, temperature and humidity. It provides a good production environment for the technics process, thereby enhanced the production yield. This paper will introduce that, according to the actual situation at the scene, analyze the system principle and network communications of the SCADA system, and make the project design of the clean-room air-conditioning SCADA system and finish the project at last. This system is based on three layers network, named CLK1, CLK2 and upper-Ethernet individually. CLK network is a kind of factory automation network, through which get data transmission by a variety models of OMRON PLC. CLK network supports data sharing and information service function of the data link. It can send and receive data in need. This set of SCADA system get data acquisition by OMRON PLC. And it is integrated on the Rockwell's RSview32 monitoring software platform.