Research On The M&C System Of A Test Instrument For Mechanical Properties Of Micro Components

MEMS(Microelectromechanical Systems),and named Micro mechanism or Micro system and so on, are a kind of Microelectromechanical Systems which integrate micro sensor, executing mech-anism,signal processing and controlling circuit, interface circuit, communications and power supply. MWMS has being paid attention to and will be widely used in the future.scientists forecast that the development of the MEMS will bring a new revolution of the technology,and will be one of the most potentail high and new technology.Material mechanical properties of the MEMS is the one of the important basic academic problems,which include rigidity, elastical modulus, yield strength, break strength, fatigue resis-Tance and so on.Many properties of the micro components are far beyond what are the categories of the macroscopical mechanics,and the traditional measure technology is far beyond the need of the development of the MEMS. Finding a new measureing method and a instrument which is high in precision and low in cost and convenient when using is a instrument requirement.Therefor,to meet the needs of system for weak signal gathering and processing,a high presion and reliable hardware and software architecture of general M&C system is designed.The test instrument for mechanical properties of MEMS materials consists of four parts,namely precision positioning subsystem,specimen clamping subsystem,load and displacement measureing subsist-em and measurement and controlling subsystem. Measurement and controlling subsystem is the important part in the test system of the MEMS materials mechanical properties.In the M&Csubsystem, DSP is used as its CPU to realize signal processing and servo control of the direct current motor,24 bit A/D is adopted for data gathering,and the PCI bus is employed to communicates with computer. In the thesis,the following studies on measurement and controlling subsystem are completed:First, the importance and current situation of test instrument for mechanical properties of MEMS materials is introduced briefly.Second, the integrity introduction to test instrument for mechanical properties of MEMS materials is carried on,the function and characteristic of M&C system is also emphasized,and the system design scheme is proposed. Third, according to the M&Csystem hardware architecture ,the key design and method of each composition module is proposed,includeing DSPsmallest system design,data gathering module design,programmable logical module as well as computer interface module design .Based on hardware design,the preliminary system software design has been completed in the paper.Finally, the M&C subsystem and the precise localization subsystem are integrated into the system.System function and partial performance test are completed.The test result proves that the design of the M&Csystem can meet the need of testing, and the scheme is accurate and feasible.