The Implementation And Application Of Intelligent Equipment Monitor System In TJ FAB

Equipment Automatic Program (EAP) must be a process and quality control program in above 8-inch Wafer FAB, and check every action before each lot processing, it controls the recipe and equipment operation. Once it found out exception, this lot would be pending to be processed. Thus, it can avoid miss-operation and all wafers in this lot scraped. EAP combines with MES (Manufacture Execution System) to control every lot normal process, statistic data and analysis for the status of wafer and EQP (equipment).This method only can control lot-to-lot monitor. If the equipment (EQP) is instable, then processed wafer and EQP status could not be monitored effectively. In this situation, not only the probability of wafer rework and scrap will be increased, but also the management of EQP is not timely and in effect. So bring the iEMS (intelligent Equipment Monitor System),base on EAP and MES system, using monitor EQP status in real time, responses timely and provide analytic data, as an important part of CIM.iEMS is composed of iEMS DB(Data Base), iEMS Cell Server, related EAP and iEMS UI. iEMS DB uses for storage all data, included parameter list, raw data, SPEC, Actions and OO history. The function of iEMS Cell Server is that decides classify received data and insert into DB, and verify data by SPEC. EAP collect data from EQP to iEMS cell server. iEMS UI is the window, which could query and Statistic data for user.This project related to IC process, CIM system, EAP program, EAP Cell Server and so on. Along with whole iEMS structure, work principle and actualization in TJ fab.