Generating Images And Beam Shaping Based On Diffractive Optics Effects

Modern diffractive microoptics developed based on the optical wave diffractive theory is a leading discipline formed by the crossing of microoptics and microelectronics. Diffractive microoptics elements have some characters such as small size, light weight, replicating easily, and so on. Diffractive microoptics technology can be used widely in many applications, for instance, micro-opto-electro-mechanical system, optical fiber communication, military field, etc.Over the basis of acquiring the fundamental theories and basic methods needed to design and fabricate diffractive microopticas elements in visible, infrared, and THz region, respectively, deep researches in image simulation, image stealth, optical image encryption, and the beam shaping, are performed.The main works in this dissertation are as follows:(1) According to the theory of Kirchhoff scalar diffraction, the fundamental theory for the algorithm designing of diffractive microoptics element is set up;(2) According to the anisotropic etching characteristics of {100}-oriented silicon materials in KOH solution, the phase step structures with expected depth can be obtained through controlling the key parameters such as the opening size and position in photomask, the concentration and the temperature of KOH erosion solution, and the etching time;(3) According to the characteristics of light processed in different spectral region, the diffractive microoptics elements have been fabricated using method consisting mainly of a single step photolithography and a dual-step KOH etching;(4) Diffractive microoptics phase structures for image stealth have been designed based on the requirements of image target stealth, and the computer simulations for image target stealth are achieved;(5) Diffractive microoptics phase encryption structures have been designed based on the theory of the diffractive microoptics data encryption and image information hiding technology, and the designing examples have been analyzed and discussed;(6) The researches in developing the method for beam shaping based on modern diffractive microoptics is a hot issue in modern wavefront correction fields. A variety of diffractive microoptics devices have been designed.