Research On Power Driver Of Planar Motor

Lithographic machine is the most important and complicated one in all of the IC equipment, whose chip processing precision determines the density and performance of the chip, and also directly indicate the manufacture strength and level of a country. Among the lithographic system, the planar motor is the core part, it must have big power, quick response, high linearity degree to achieve high speed exactitude driver, so it gives the driver system a strict requirement. In this paper, aim at the practice needs of the lithographic machine to the driver, I give a planar motor driver structure using high power BJT, then design and analyze it.In this paper first gives a brief depict about the power driver circuit, combining with the request of planar motor to the driver, gives the collectivity design scheme. Then according to the planar motor driver's characteristic, introduces the design of the BJT power amplifier, solves the problems the power driver circuit face with, and then analyzes the rationality and feasibility of the design. At last, aims at the necessary performance of the driver of the research, some experimentation had been done, include the experimentation of frequency response, the experimentation of linearity degree, ect. The result of experiments proves that the target of the research has been arrives.By analyzing and contrasting, the feasibility of the BJT power amplifier driver is described. The prospect of the research is depicted in the paper also.