Research On The Dynamic Performance Of Microstructure In MEMS

As the advancement of human society and science and technology, people's requirements for mechanical systems become more sophisticated, but general mechanical system has been unable to meet human needs. It requires the mechanical system to develop in the direction of miniaturization. With their own, such as small size, light weight, low power consumption, high speed, high sensitivity, MEMS has been very rapidly applied to the aerospace, military, biomedical, information, automation and other fields. However, MEMS did not as originally imagined rapid develop. Stability and reliability, which caused by the particular structural characteristics of the micro-structure, have become a bottleneck problem.. It is particularly urgent and important, that the research for the dynamics of the micro-structure. When the difference between material intrinsic length and micro-structure size is very small, the metal mechanical properties show strong size effect. What's more, the role of air resistance becomes impossible to be ignored.. All the above, size effect and the air damper have became great impact factors to affect the dynamics of the MEMS. Classical continuum theory has been unable to explain these phenomena. Because of the elasticity of classical theory, it can not solve the problem about dynamics of micro-structure system. This article will tell something about the dynamics of the system components. Based on elastic theory, the classical Newton theory, and the strain gradient theory, I will discuss the effect of scale effect in MEMS when girder bends, girder converses, and sheet bends.