Study On A New Type Of Folding Field Emission Cathode Fabrication Process

Field emission display (FED) can offer cathode-ray-tubes-like performances such as high brightness, high luminous efficiency, wide viewing angle, high video rate speeds and wide temperature / humidity range together with LCD-like pixel resolution and thin profile without power hungry backlights. Therefore FED was considered to be the most promising applications in the fields of panel display.In this thesis a series of theoretical and experimental researches on the field emitter cathode have been carried out. The thesis mainly consists of the following parts:(1) The development history, current research status and fabrication process for the field emitter cathode have been summarized. The inverse pyramid holes arrays in Si substrate was fabricated by wet etching, and the microtip field-emitter array was formed using pulsed laser deposited GaN thin film on polymer microtip array.(2) Correlative theory of field emitter has been studied. Moreover, the relationship between the field emission current and the work function of field emission array (FEA) have been analyzed.(3) The physical process and the mechanism of the ablation of target by femtosecond pulse laser deposition (PLD) and nanosecond PLD have been studied.(4) The technological process has beeen introduced which microtip field-emitter array was formed using pulsed laser deposited GaN thin film on polymer microtip array.(5) The field emission property of the polymer micro-tips array (PMA) coated with GaN thin film by PLD have been investigated. The result shows that the quality of PMA and the field emission property for the PMA coated with GaN thin film using femtosecond PLD is better than that nanosecond PLD.In a word, the processing method used to fabricate polymer micro-tip has been introduced, which can provide a new method for the fabrication of a new style folding flat-panel FED.