Study On Diamond-Like Carbon Thin Film Deposited By KHz Femtosecond Pulsed Laser

Diamond-Like Carbon (DLC) thin film has very important applications in scientific research, national defense and industry due to its characteristics, such as high hardness, excellent optical transmission, very high thermal-conductivity, low friction coefficient and very good physicochemical properties.This thesis mainly focus on the technique research on the fabrication of diamond-like carbon thin film by using femtosecond pulsed laser deposition in room temperature and improving the processing of preparation of DLC thin film by changing the parameters of laser. The laser used in the experiment is a Ti: Sapphire laser with pulse width of 50fs, repetition rate of 1 kHz and wavelength of 800nm, which directly ablates the graphite target with the purity of 99.999%. We fabricate DLC thin films on different including quarts, optical K9 glass, monocrystalline silicon, monocrystalline germanium and ZnS, the average growth rate of DLC film is 85nm/min, and the characteristics of the DLC thin films, such as optical, mechanical and physicochemical properties are studied. Raman spectrum research show that D band and G band located at 1363cm-1 and 1538cm-1, respectively, which is the typical Raman spectrum of DLC structure; the DLC thin films on quarts, monocrystalline silicon and ZnS have transmission-enhanced performance, and transmission on ZnS with prepared DLC thin film is 16%; the analysis of Atomic Force Microscope indicated that the prepared DLC thin films have nano-structure. Based on distribution of laser plasma, we optimize the structure of deposition and obtain the DLC thin film with strongly bonded layers, bright and clean surface with smaller internal stress with the diameter of 50 mm with good thickness uniformity, which lay a good base of future research.