Research And Development Of Board Driver Based On VxWorks System

With the imburse of the important practical item "100nm Step-and-Scan Photolithography" of National Hi-tech Research and Development Program, for the sake of improving the nation's independent development and innovation ability of strategic equipment in semiconductor chip manufacuring, the Dose Control Board in Illumination Project Control subsystem is mainly developed while the whole framework and the principle of lithography being widely researched in this project. The function requirements of Dose Control Board, the Negotiation Algorithm of dose control, the theory of communication and interfaces design are researched in this paper, and the Dose Control Board's driver software is developped.Firstly, the function requirements of dose control in an exposure is studied, the inteface between the Illumination Project Control subsystem and the illuminator is designed, the controlling of laser dose is accomplished using dose control algorithm, the objective of delivering correct laser pulses at right time at wafer level is achieved. The external interfaces of the dose control function are designed based on the configurable embedded real-time operating system VxWorks.Secondly, a Communication Network module is developed which can be used in the whole control system. The standard socket application program interfaces in VxWorks are packaged into some facile interfaces in terms of the point-to-point communication requirements in the whole photolithography control system.Thirdly, a negotiation algorithm is described to synchronize the Illumination Project Control subsystem and the other subsystems. It's used to make all the relative subsystems be ready for an exposure. This algorithm is realized in the Dose Control Board's Driver software.Lastly, the Dose Control Board's Driver software is developed based on the VxWorks system. A test method used in an embedded system is introduced where the driver, firmware, and hardware are tested together. The integrality and performance of the Illumination Project Control subsystem are tested with this method.The Dose Control Board's Driver software developed in this paper is checked and accepted by Shanghai Micro Electronics Equipment Co., Ltd in Dec of 2005.