Research On Frequency Trimming Of Quartz Crystal Resonators By Laser Etching

The quartz crystal resonators, with their good frequency stability, high Q value, high oscillating frequency and small volume etc., have had extensive applications in various military and telecommunication equipments, computers, household appliances and many other industrial electron equipments. With the fast development of science and technology, there is a more and more demanding requirement about the frequency accuracy of the quartz crystal resonators. It has always been a hot point problem in both domestic and international research and production that how to trim the resonance frequency of quartz crystal resonator accurately.This dissertation probes into a novel frequency trimming technology -- laser etching frequency trimming technique. This dissertation researches on this technology from several aspects like etching mechanism, etching technique and so on. At the same time, provides solutions about how to deal with and reduce etching damnification and how to industrialize it.The main results of this dissertation are listed as follows:1. Two kinds of trimming technique are brought about and carried out, i.e. laser thinning and laser figure etching. As the research shows, both of the two techniques can be used to trim resonance frequency of quartz crystal resonators accurately, and the laser figure etching technique is more suitable for industrialization applications. This has not been reported internationally.2. By analyzing the mechanism of laser etching damnification, brings out the Four Variables Theory, which means that the atmosphere environment, vacuum environment, laser thinning and laser figure etching are four variables independently affecting the frequency trimming results as the dependent variable. From the experiments, the maximum trimming frequency without damnification is 500ppm for laser thinning technique in vacuum environment, 100ppm for laser thinning technique in atmosphere environment, more than 2000ppm for laser figure etching technique. These experiments have provided valuable parameters and references for the application of laser etching frequency trimming technique. 3. Based on the above research, the industrialization and other applications of the laser etching technique are further probed into. Solutions such as multiple slices trimming at the same time, variable figures trimming technique are brought about. Also, the system solution of the integral quartz crystal resonator frequency trimming system is provided. What's more, this dissertation forecasts the development trend of laser trimming technology.The advantages are analyzed theoretically that this kind of technique has overother frequency trim techniques like evaporating deposition, sputtering deposition andion beam etching frequency modulation.