Research On Key Technology Of Large Scale And Travel Stage For Projection Imaging Exposure

High-precision and high-resolution-precision, micro-displacement system that in the modern sophisticated platforms industrial production and scientific research fields occupied the very important position; it has a direct impact on sophisticated ultra-precision machining accuracy, precision measurement accuracy and ultra-large-scale integrated circuits production level.Based on the table itself institutional needs stability and made studies, active and passive use of a combination of mixed vibration isolation systems, the micro-nanometer measurement to provide a good environment isolation, the isolation and passive vibration isolation system performance analysis test and the passive hybrid isolation system design. Passive vibration isolation system of two passive and positive vibration isolation performances is better than isolation single-passive vibration isolation system.Based on the theory of a laser interferometer and technical study on the three elements of laser interference, that is, light interferometer structure and interference signal processing methods. Draw a conclusion that dual-frequency laser interferometer with laser frequency stability, monochromatic of good, thorough monochromatic light source to overcome the structural limitations interferometer, it is a good measurement and feedback systems.This paper studies the table for X and Y directions respectively linear stepper movement and the drive to do research, think through PID control of the linear motor servo motor and closed-loop feedback in the accuracy, speed and multi-function controller through PMAC makes its controllability can be good to meet the needs of working platform.This paper studies the micro-advance piezoelectric ceramic, piezoelectric ceramic micro-drive power to the device is a key part of the micro-advance equipment, the piezoelectric ceramic driver on the hardware of power, and switch-mode power-driven precision piezoelectric ceramics and enlarge DC Power Supply programmer.