Research Of Manufacturing Process On 3dB Lange Coupler In Microwave Integrated Circuit For Space

Lange coupler is widely used in microwave circuits. It is basic circuit style which is a part of the power divider and power synthesizer of RF amplifier, mixer, modulator. the Performance of Lange coupler affect the final Performance of power divider, mixer and modulator. For a long time, the Performance of Lange coupler can not be satisfied. By analyzing. Nowadays manufacturing process can not reach the requirements of high precise and consistent among batches.In this dissertation, aiming at design and manufacturing of 3dB Lange coupler, by analyzing the design principle of 3dB Lange coupler, craft distortion control, the Key factors which affect final performance are confirmed. After lucubrating the influence of various manufacturing processes to enhance performance of coupler, such as coupling, isolation, phase drifting and return loss, etc.; according to high reliability requirement of microwave integrated circuit for space application, new or updated process and materials are used to fabricate a good performance 4/6GHz 3dB Lange coupler, satisfied the requirement of 6/4GHz transmitter' manufacturing. supplied a basis for 12GHz,20GHz coupler. By analyzing the internal mechanism , strongpoint and process of selective pattern electroplating , dry etch , plasma cleaning and air bridge process , It's confirmed that introduce these new technologies in the process of high reliability microwave integrated circuit is rather important.