Design And Investigation On Novel Micro/nano Photonics Sensors

Along with the development of photonics integrated technology, integrated micro/nano biochemical photonics sensors based on SOI with high sensitivity, easy to miniaturization, low cost and high-quality specification, has a great future in the environmental monitoring, illness, medical and so on. In this paper, we present several new silicon biochemical sensors to miniature the sensor footprint, achieve large detection range and high sensitivity. The thesis mainly includes the following items:Firstly a novel optical resonator based biosensor with spiral-double-racetrack resonators was proposed. In order to verify that sensing performance can be improved by vernier effect, we broke it down into two single-coupled-racetrack. Combined with the specific numerical simulation optimization based on transfer matrix and resonance condition, sensing characteristics have been investigated numerically. The device show good performances, such as high sensitivity, good linearity and wide measurement.Secondly we proposed two kinds of MZI-based ring cavity: clovers-shaped and pea-shaped. We built clovers-shaped model from two MZI equilibrium and non-equilibrium states, studied the effect of the waveguide geometry parameters on sensor performance, and optimized the device dimension. As for the pea-shaped device, we described sensing mechanism briefly, and then studied the performance of single-pea and double-peas by combining two separate structure designs. The numerical results showed that both designs have significant advantages in terms of sensing performance compared with the traditional single ring resonator biosensor.Finally three kinds of sensors based on grating structure were designed using FDTD. Based on the grating annular resonator, we analyzed the Bragg grating reflection of annular cavity with the change of related parameter of grating and studied the mode splitting phenomenon in transmission curve. Sensors with ring and grating modulated mutually were presented. According to simulation results, ring modulated sensor has large ER and a resonant peak among wide range and low sensitivity. Sensors with grating modulated structures have the benefits of high Q factor, high ER and high sensitivity. So it is suitable for optical biochemical detection application.