Study Of Laser Micro-processing Micro Device And Ultra-thin Pt Film Temperature Sensor

With the high speed development of MEMS technology, micro-sensor and micro device which have high sensitivity, high stability, good reliability and the ability of detection in minute space became the hot spot of development. So in the paper, laser micro-processing technology was used to develop many kinds of micro-sensors and micro devices and ultra-thin Pt film temperature sensor.In the paper, the characteristic, the operating principle and the system composition of laser micro-processing technology are introduced, and laser micro-processing technology is studied profoundly. The relation between laser scribing craft parameter and the groove depth and width on Al2O3 ceramics substrate, and the relation between laser trimming resistance craft parameter and pt film trimming resistance precision are studied. Through studying specific laser micro-processing technology, sufficient basis is supplied to manufacture micro devices by laser micro-processing.Laser scribing controlling software was used to design figures, and laser scribing machine was used to manufacture mask plates and coating cramping apparatus of wind speed sensor, gas sensor, temperature sensor and etc. These sensors manufactured by magnetron sputtering were implemented. The sizes of these sensors are obviously reduced, and the sensitive property of the sensor was obviously improved. Mask plates and cramping apparatus of micro mechanical robot were manufactured. The sizes of robot devices are reduced. And function of robot is increased.In the paper, ultra-thin Pt film temperature sensor was manufactured which has the merit of ultra-thin substrate, micro size, good stability, short response time and high reliability and consistent sensitivity to Pt resistance. The film substrate is Al2O3 ceramic made by electrochemical corrosion technology. The thickness of the sensor is less than 0.1mm, and its size is about 3mm×2mm. The capacity of the sensor is smaller than traditional Pt film temperature sensor by two orders. Laser trimming resistance technology was used to design and modify ultra-thin Pt film temperature sensor, and the resistance value is 50? and 100?. In order to resolve the problem of leading wire abscission appeared in traditional leading wire welding technology, laser scribing technology was used to divide leading wire groove in the extrode, and realized embedded type connection of leading wire and electrode.