Research On Film Micro-forming Based On Laser Spallation

As a new subject developed in the late 1980’s,micro-forming technology has been widely applied in the aerospace, medical equipment, electronics and other fields. Micro-forming is a technology which used to produce the components whose size are at least in millimeter level. In general, the parts which used for forming in industry are 500nm-500μm in size. Compared with micromachining method, using microforming we can easily assure the quality and precision. Even more importantly, the microforming will be a development trend due to the fact that microforming process is suitable for automation production, convenient for control and operations.Film micro-forming based on laser spallation is a new micro-forming technology. Based on the mechanism of plane stress wave transmission in the double-layer media.Laser driven flyer loading technology was adopt in the forming,the flyer achieve large speed with high power density pulse laser and generate high-pressure shock wave which achieve peak spall pressure,metal foil can be precise forming with micro-die.The basic forming mechanism was expatiated,and film micro-forming based on laser spallation experiment was designed and accomplished. The mainly factors affecting the forming process has been discussed,Such as laser energy density, the thickness of film, the stress wave pulse, and film and the substrate acoustic impedance matching. The forming process of the failure phenomenon is analied.With the FEA software-ABAQUS, the process film micro-forming based on laser spallation is simulated. The simulated results are consistent well with the experimental ones. Thisshows that the model used is correct.Therefore, film micro-forming based on laser spallation technology will be a novel method which is characterized by low-cost, high efficiency. The batch produce can carry out with array die.Nevertheless the experiments show the high potential industrial application.