Assist System For Laser Micro-Fabrication

MEMS characterized by microform dimension and micromanipulation scope, along with the development of micro technology, becomes a high & new-technology for exploring and rebuilding the world from microstructure. Laser micro-fabrication technology provide a new way to produce parts of MEMS and become a very important research field.This paper talks about laser micro-fabrication system, it separately research on the assist devices and controlling software for removing material fabrication system and adding material system.On removing material fabrication technology, with the target to set up an excimer laser direct writing micro-fabrication system, the elements of an excimer laser direct writing micro-fabrication system was introduced. The controlling software was designed on the base of movement controlling card and working platform. For producing complicated parts, The CAM interface program was also designed with the way of second development technology on AutoCAD. Through the experiments, it can be confirmed that the CAM interface program was properly designed. Some samples were shown in the paper.On adding material fabrication technology, the target is to set up a fiber laser powder prototyping system. According the requirement of laser powder prototyping, a paving powder device was set up. The controlling system of paving device on the base of movement controlling cards was set up and its controlling software was developed with C++ language to realize automatic paving powder. At last some experiments such as muli-layer melting were done, Through the experiments, it can be confirmed that the paving device and its paving program were properly designed. Also thers are some metallic samples were shown in the last part of this paper.