| The concept, the development history, the present status and the future trend of biochip–capillary electrophoresis chip (CEC) is analyzed in this paper. The capillary electrophoresis chip which is the analysis instruments is the important stage that sciences instruments will be trend to micromation, integration and consumption. It plays an essential role in bio-chemical field. The oversea and inland research status about CEC is studied carefully, and a new high-speed excimer laser micro-machining technique is presented as the fabrication method which is for PMMA based high-performance capillary electrophoresis chip, and set up a laser-induced fluorescenc detection system for CEC.The reasonable simulation machining parameters is firstly selected for CEC. The relationship between the microchannel,the pool,the roughness of the chip and machining parameters of excimer laser is researched in paper. A PMMA based electrophoresis chip is fabricated under 19Kv,5 Hz and 5mm/min. After that, the chip is bonded together with another same size cover chip to get well whole chip. The whole chip can be finished in 30 minutes. In end, machining the chip with a sifter is studied and it is successful, which can secondly select sample.Transverse affect zone is observed on the microstructure's surface when the experiment of micro-machining PMMA by KrF .The relationgship between regions and the parameters of the laser is studied. The measure of machining under the water is adopted. Based on the result of the experiments, this measure can effectively reduce the transverse affect.Laser-induced fluorescenc detection system is established in paper. In the end, the Cy5 dye is successful and fast separated on unmodify microchannel of the chip, and it gets well detection information by laser-induced fluorescencdetection detedtion system.The result shows that, this detection system has some characteristics, such as compact structure ,good stability and high sensitivity. |
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