Research On MEMS-Based Piezoelectirc Energy-Harvesting Micro-Device

At present, the large volume and limited life of conventional batteries can't meet the requirement of wireless sensor networks and embedded systems. As a way to solve this problem, MEMS-based enery-harvesting technology can harvest the environmental energy and transform to electricity, without working life limit . Moreover, it realizes self-power and the integration with the electronic devices.A MEMS-based piezoelectric energy-harvesting micro-device is reseached in this thesis, whose principle is piezoelectric effect of PZT film that transform mechanical energy to electricity. The main contents and conclusion are stated as follows:According to the frequency of envionmental vibration source (below 1000Hz), it is proposed a cantilever structure combined with a mass to be the PZT carrier; The structures of d31 and d33 mode devices are designed, the dependence of output performance on geometry parameters are calculated and analyzed by MATLAB; Based on the analyzing result, the d31 and d33 devices are designed; The d33 device are fabricated to test its electric output...