Mems-based Micro-power

With the rapid development of MEMS technology, various MEMS devices are invented. However, the provision of power supply to those devices remains a problem to be solved, because the conventional power supply too large in size and too short in life to be integrated into MEMS devices. Therefore it is imperative to develop a new type of power supply that has a micro structure and a longer life.This thesis comes from the project of solider-life parameter monitoring system. It studies piezoelectric micro-vibration power generating device based on MEMS technology. Firstly it analyzes the working principles of the device, i.e. utilizing the Piezoelectric effect of PZT Piezoelectric material to convert the mechanical energy into electric energy in a vibrating environment to provide electricity for MEMS devices. Next a simple deduction of the vibration features and Power output features of MEMS devices is made according to Mechanics of Materials, Vibration theory and Piezoelectric theory. Then it makes a simulation analysis of the devices using the finite element analysis software ANSYS 10.0. through Modal Analysis and Harmonic Response Analysis to obtain the structural size parameters of Piezoelectric micro-vibration power generating devices and the correlation between their natural frequencies and output voltages, hence a theoretical reference for the final parametric design of Piezoelectric micro-vibration power generating devices. At the end, a plausible process design for manufacturing MEMS devices is proposed in the light of existent literature and the practice on M鄸?production line.