PCR-Chip Integrated With Thermoelectric Temperature Control

PCR-chip is a function biochip for DNA polymerase chain reaction. The temperature control section is so important that it decides the performance, dimension, integration of the whole chip. Thermoelectric material has particular merit for micro volume temperature control, which make it become the ideal material to structure the temperature control section of the micro-fabricated PCR-chip. In reference to the achievements domestic and abroad, about the micro-fabricated thermoelectric models, the integrated micro-fabricated PCR-chip can be made with help of thin-film technology and MEMS technology. The chip composes of chamber, channel, temperature sensor and thermoelectric temperature control section. The whole dimension is 8mm × 4mm × 2mm. The volume of chamber is roughly 2 micro-liters with the size of 4mm × 2mm × 0.3mm. The bottom of chamber is constructed by the film of Si₃N₄ with the thickness of 2 micrometers. The platinum temperature sensor is deposited on the Si₃N₄ film. The thermoelectric material is deposited onto the bottom of chamber. This layer is structured by a series of Peltier models. The thickness of the thermoelectric film is 0.4μm, and the thickness of the whole temperature control section is 1.2μm. Furthermore, we can switch easily between heating and cooling status by changing the direction of the current. The integrated micro-fabricated PCR-chip is miniaturized, low-powered, and easy-operated, which will bring remarkable convenience to the operators. It can be very expediently applied to the medical, environment analysis in outdoor. It will also greatly promote the realization...