Research On Thermoelectric And Photoelectric Effects Of Self-powered Low-power Thermoelectric-optoelectronic Integrated Microsensors

With the rapid development of Internet of Things technology,more and more wireless devices are being used in the field of network data exchange.These wireless devices often rely on traditional battery powering.However,the traditional battery life is limited,which greatly limits the promotion and popularization of the Internet of Things technology.Thermoelectric and photovoltaic energy harvesting technologies that enable sustainable power supply provide solutions to this local power supply.In this thesis,the author combines thermoelectric energy harvesting technology,photoelectric energy harvesting technology and MEMS technology,and designs a thermoelectric-optoelectronic integrated microsensor for harvesting thermal energy and light energy in the environment and supplying power to wireless network transmission nodes and low-power components.Firstly,a kind of thermoelectricphotoelectric integrated microsensor is design,which integrates thermoelectric energy collection technology,photoelectric energy collection technology and MEMS technology.Then,the thermoelectric-optoelectronic integrated microsensor is simulated.After that,the process steps and layout design of the thermoelectricoptoelectronic integrated microsensor are described in detail.The thermoelectric-optoelectronic integrated microsensor designed in this paper needs to optimize its performance parameters.Due to factors such as process and size,thermoelectric and photoelectric parameters of MEMS materials and traditional macroscopic materials have significant differences.So it needs to design test structure to test the thermoelectric and photoelectric parameters,which includes conductivity test structure,seebeck test structure and thermal conductivity test structure.On the one hand the designed thermoelectric-optoelectronic integrated microsensor can harvest the thermal energy in the environment,thereby solving the problem of heat dissipation of some devices,improving the electromagnetic compatibility environment of the device and improving the utilization efficiency of energy.On the other hand,it can harvest the energy of the light in the environment.Its application prospects will be very broad,and it is worth further research and exploration.