Research And Processes Of Wide Range Micro-acceleration Sensor

Micro-electro-mechanical System (MEMS) is an advanced technology and a new-developed compositive subject in the 21st century, related to the subject of electrical and mechanical engineering, material, manufacture, autocontrol, physics, chemistry, biology and so on. Micro-accelerometer is one of the most important and active research fields in MEMS. It is widely used for inertial navigation and inertial guidance as well as a number of other applications, such as biology medical treatment, agriculture, automobile industry, prospecting, seismology measurements, robotics, automatization of industry, toy and so on. A kind of capacitive micro-accelerometers with MEMS technology is designed in this paper. The sensor is formed with a sandwich structure of Si-glass-Si which is fabricated by SOI and anodic bonding techniques. The sensor can meet the requirement the wide ranges of acceleration. Therefore, the main tasks of this thesis are as following:1. Analyzing the theories of several micro-acceleration sensors, making a comparison between their advantages and disadvantages, synthetically considering our experiment conditions and the thesis characteristic, finally capacitance accelerometer mode is put forward.2. Analyzing the theory of wide range micro-acceleration sensor. The structure and the parameters of the micro-acceleration sensor are designed, the mathematical model is built. The requirement of stability is satisfied. Analyzing the requirement of safety. Then according to the established structure, the parameters of the micro-acceleration sensor are modeled and optimized. The...