Research On The Key Technology Of Design,Manufacture And Encapsulation Of The Butterfly Acceleration Sensor

Fault diagnosis and safety monitoring have urgent demands on micro-acceleration sensors.However,the current products in market are mainly products based on high-precision and low-range,and the product range and some performances cannot effectively meet the monitoring requirements in the field of fault diagnosis and safety engineering.Based on the previous research,a butterfly micro-acceleration sensor with high resonance frequency,high-range,small vol?me and stable performance is proposed.Systematic research has been carried out on sensitive structure design and optimization,processing technology,integrated packaging,and main performance testing.The main contents include the following aspects:1.Sensitive structure optimization.This paper further reduces the sensitive structure size of the butterfly accelerometer under the premise of ensuring the main performance metrics.The built-in anchor design makes the structure more compact;the stress relief beam structure is used to effectively reduce the influence of structural stress on the performance of the sensor.In this paper,the theory and simulation analysis of the working principle and main performance metrics of the sensitive structure of the butterfly acceleration sensor are carried out.2.Processing technology design and optimization.For the sensitive structure of the butterfly micro-acceleration sensor,the processing technology based on SOI(Silicon On Insulator)wafer is designed.The paper introduces the processing flow of the sensitive structure of the butterfly acceleration sensor,and elaborates the key processing techniques such as high resolution lithography,low stress silicon-silicon bonding,and glass paste bonding technology in details.3.Butterfly acceleration sensor integrated package.The butterfly wing acceleration sensor includes a sensitive structure,a signal detection circuit,a package structure and so on.The detection circuit adopts a modulation and demodulation method of switching reverse-phase symmetric excitation,which can effectively reduce environmental interference and improve detection resolution.Finally,the sensitive structure is integrated with the detection circuit and packaged into the package structure to complete the package,thereby increasing the reliability of the sensor and also facilitating later testing.4.Performance test of the butterfly acceleration sensor prototype.The main performance metrics of the butterfly acceleration sensor were tested.The test results show that the application requirements of vibration range?±100g,sensitivity error ?5%,and resonance frequency>15k Hz can be satisfied.