The Study Of Fixed Beams Acceleration Sensor Based On Racetrack Resonator

Micro-nanofiber is a novel type of waveguide wires with the diameter on the micro,even nanometer scale which uses air as the cladding and silica or other materials as the fiber core, whose characteristics are different from both the conventional fiber and the integrated optical waveguide structure. Because of the vast range optical evanescent wave, micro-nanofiber has characteristics of strong evanescent wave coupling, low bending loss and high chromatic dispersion region, etc. Comparing with the conventional fiber, micro-nanofibers have smaller size, lower loss and stronger coupling. Comparing with the integrated optical waveguide, the manufacture process of micro-nanofibers is more simple and feasible. Since micro-nanofiber ring resonators have characteristics of low loss and high quality factor, they can be used as the optical sensor with high sensitivity. The MOEMS acceleration sensor combined with micro-nanofibers and silica MEMS sensory structure is a sensor with small size, light mass, high sensitivity and wide dynamic range. The main works of this article are:First we briefly introduce the research background and significance of our project. The current development of micro-nanofibers, application area of microring resonators and current research status of acceleration sensor based on micro-nanofibers has been introduced briefly. Then we analyze the theories and characteristics of micro-nanofibers after discussing the transfer theory and energy distribution of micro-nanofiers. And how the coupling coefficient t, transmission loss factor τ and effective refractive index n affect the transfer characteristic of micro-nanofiber have been analyzed.We propose a novel double sides clamped beam acceleration sensor based on micro-nanofibers racetrack resonator. The transfer theory and resonance principle of racetrack resonator, the stress distribution of double clamped beam, the sensing principle and the sensitivity of sensor have been analyzed. Optical field distribution of racetrack resonator with different effective refractive indexes and the modes of double sides clamped beam have been simulated, which proves that we can measure the acceleration through detecting the wavelength shift or detecting the light intensity. We specifically analyze these two methods through using MATLAB simulation software, and conclude that the parameters of double sides clamped beam are important factors affecting the sensitivity of acceleration sensor.At the end of this article we briefly introduce the experiment processes of making micro-nanofibers and micro-nanofiber resonator. By using the alcohol burner melting method, we obtain the micro-nanofibers with the diameter about 2 micrometers. We also make a racetrack ring resonator by using the obtained micro-nanofibers. The concrete making processes and matters needed to know have been expounded. We verify that the spectrum characteristics of made micro-nanofiber racetrack ring resonator is basically consistent with the theoretical analysis.