Study On Controlling The Super Smooth Surface Roughness Of Optical Components

The work was mainly on a little larger roughness and surface defects for the fabrication of super smooth surfaces. And we have a systematic study on the influence and control method of the main parameters on the polishing quality during the process of polishing. However, the mass manufacture of high-quality optical components is also difficult, as a result that physical and chemical factors are extremely complex. Actually, it is the ultimate goat that super smooth surface is fabricated automatically.The impact of the major parameters on the polishing quality is studied :1. It has been summarized the technical classification for the super smooth surfaces, their strengths and weaknesses, the technical and development status, respectively. According to our national development reality, the focus on the research is to improve and optimize the traditional polishing technologies.2. It has introduced the main characteristics of the super smooth surfaces, the key role in the ICF and the effects on the quality of the transmission beam. In the ICF system, huge number of optical components with super smooth surface is required and the requirements accuracy control for the system come to the limits. Therefore, the manufacture technics of the optical components with super smooth surface have become the bottleneck problem, so we should raise our level to breakthrough it. And it has introduced the operation method, advantage and disadvantages of the tested device for the super smooth surface's quality.3. The effect of the polishing powder's characteristics on the polishing quality has been studied in detail. There are many feature parameters in the polishing powder, such as the distribution of the particles size, the size of crystalline grain and the appearances of polishing powder, which have an influence on the quality of the...