The Study Of The Polishing Analysis Of The Super-Smooth Surface Of The Low-Temperature And Semi-Consductor Materials Without Abrasive

This paper is based on the national natural science foundation project , " the theory and the experimental research of the egyptian-class and low-temperature super-smooth surface abrasive polishing , and study the method of the low-temperature and non-abrasive polishing.This article detailed the process of making the low-temperature and non-abrasive polishing experimental device , the ice plate , work plate .and detailed the technology of this processing method and how to complete the clean and measurement and completed the polishing experiment of the semi-conductor materials in the conditions of different water quality , head pressure , ice disk speed , disk eccentric word and polishing time . In these conditions , we studied the impact law of the results . We have got the optimum date that we need . and we used the theory of the surface , interface and semi-conductor materials structure to make the complain and study in the micro-atomic and molecular scale.