Design And Manufactue The Packaging Of MOEMS Optical Switch

All optical networks has become a trend, and optical switch is a key component that can control the light on or off in all optical fiber communication networks. MOEMS switching technology has present unparalleled advantages over other technologies. The switches based on MOEMS technology will become main device in the next generation optical communication system.The packaging system consists of collimator arrays and V-grooves pedestal. The collimator arrays are combined in V-grooves by active alignment of the collimator arrays with microchannels.The optical collimator makes lights from laser diode or optical fiber parallel in order to reduce optical loss or to add a variety of additional functions in the middle procedure of information transmission. Selecting the optimum beam waist can be minimized the sum losses, associating with other optical requirements such as low back-reflection, low polarization dependent loss and low wavelength dependent loss. The V-grooves can be realized on a single chip in an anisotropic etch process on the (100) silicon structures. The angle between (100) and (111) plane is known on (111) plane. The height of V-grooves can be adjusted by controlling the range of...