Design And Experiment Of Collimate And Coupling System Of 8×8 MOEMS Optical Switch

More demands were put forward when the information transmit capacity and speed were required to be higher in current communication systems. Optical communication system is developed apace because it has so many merits such as tremendous transmit bandwidth,very low transmit losses and anti-interfere of strong electromagnetism. All optical exchange scheme has been the trend of modern optical network with the development of optical communication system and application of Dense Wavelength-Division Multiplexing(DWDM). Optical switch is the key element of all optical network. MOEMS optical switch arrays, which can achieve small insertion loss, low cross talk, large switching contrast, and wavelength and polarization insensitivities, are going to be the key considerations in the optical cross connectors (OXCs) and optical add/drop multiplexers (OADMs) for optical networking. Collimate and coupling technique is the key technology of MOEMS optical array. Transmit character during free space of Gauss beam and optical path during the 8×8MOEMS optical switch is analyzed. Mode theory and direct coupling quomodo of single mode fiber is discussed. Coupling method using ball lens is calculate and the needed data is got. Then coupling system design of optical switch is finished. Secondly, structure characteristic of single crystal silicon and peculiarity of anisotropy etch is studied. Convex corner compensation project is put forward in order to avoid the effect of convex etch. Design and experiment of self-collimate silicon submount of 8×8 MOEMS optical switch array is done.