The Vacuum Evaporate Preparation Method Of TiO₂ Thin Films And Ce₂O₃-Doping

Ti and TiO₂ thin films were prepared by vacuum deposition on single crystal Si,SiO₂ and glass substrates to obtain the thin films by heat-treatment in O₂. Similarly, The TiO₂ thin films Ce₂O₃ doped have been obtained on glass substrates by the same method. The effect of preparation, doping, substrate nature and annealing temperature on the structural electronic, optical and sensitive parameters was studied with XRD, SEM, EDC and electrical measurements.The results showed that the Ti thin films can be grown on glass substrates not to obtain the TiO₂ thin films by making use of analytical pure Ti powder as an evaporation source at heat-treatment in large flux O₂. So we need sometime to carry on the research work further. However, the analytical pure TiO₂ powder can be used as an evaporation source under 500℃～800 ℃ of heat-treatment in large flux O₂ to obtain the TiO₂ thin...