Preparation And Characteristics Of Nanometer Cadmium Oxide Thin Films With Dysprosium Doping

We prepare pure CdO and Dy-doping CdO thin films by vacuum evaporate-deposition on different substrates, such as glass, Si and SiO₂,furthermore take heat treatment the films. Then test the characteristics of films on structure, surface, electric conduction, optics property, etc.. So as to analyze the influences from the process conditions, contents of Dy, different substrates as well as heat treatment temperature and time on crystalline structure, crystalline grain dimension, optics and electrical characteristics of samples.The experiments shows that using the high pure CdO powder as evaporate source to prepare CdO thin films on different substrates and then oxidizing and heat treatment, can obtain the films with good performance. The experiment also shows that the best heat treatment condition of the samples on glass substrates is T=550 ℃, t =20min; And that on silicon and dioxide silicon substrates is T =650℃, t =30min. The samples all have a preferred orientation growing trend along (111) direction and uniform crystalline grain dimension. Dy-doping can influence the growth of crystalline grain and the average dimension of crystalline grain varies...